Interference filter with amorphous silicon layer and direct laser recording on it

Zamirgül KAZAKBAYEVA

The interference spectral filters with amorphous silicon layer deposited by magnetron sputtering on the reflective metal layer on a glass substrate are developed. Interference filter select from white light source components corresponding to quasimonochromatic wavelength with a narrow bandwidth. The thickness of the amorphous silicon layer determines the center wavelength of the pass band of the filter. It proposed to use interference filter with amorphous silicon layer for direct laser recoding on it. Results on direct laser recording on amorphous silicon layer of the interference filter by s ...Более